Citation: Yong ZHANG, Kun Lin ZHOU, Wei Min CAO, Wei Min LIU. PROPERTIES OF ULTRAFINE SnOx THIN FILM MADE BY PLASMA POLYMERIZATION[J]. Chinese Chemical Letters, ;1996, 7(5): 493-494. shu

PROPERTIES OF ULTRAFINE SnOx THIN FILM MADE BY PLASMA POLYMERIZATION

a Chengdu institute of Organic Chemistry, Academia Sinica, Chengdu 610000;
b Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Academia Sinica, Lanzhou 730000

Received Date: 23 June 1995

Fund Project: The project was supported by National Natural Science Foundation of China.

Ultrafine SnOx thin films were prepared from tetrabutyltin by RF glow dis charge polymerization. Annealing behaviour of films under air and gas-sensitive property were investigated.The ultrafine SnOx thin film with average particle size of 6nm exhibited a high sensitivity of 30 to 500ppm EtOH at 200℃.
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