Measurement of Concentration Distribution of Electrogenerated Etchant Using an Electrochemical Probe Technique

Lian Yong SU Jin LUO Zhong Hua LIN Zhao Wu TIAN

引用本文: Lian Yong SU,  Jin LUO,  Zhong Hua LIN,  Zhao Wu TIAN. Measurement of Concentration Distribution of Electrogenerated Etchant Using an Electrochemical Probe Technique[J]. Chinese Chemical Letters, 1996, 7(9): 835-836. shu
Citation:  Lian Yong SU,  Jin LUO,  Zhong Hua LIN,  Zhao Wu TIAN. Measurement of Concentration Distribution of Electrogenerated Etchant Using an Electrochemical Probe Technique[J]. Chinese Chemical Letters, 1996, 7(9): 835-836. shu

Measurement of Concentration Distribution of Electrogenerated Etchant Using an Electrochemical Probe Technique

  • 基金项目:

    The project was supported by the National Natural Science Foundation of China.

摘要: An electrochemical probe measurement system for detecting an electrogenerated etchant in solution is developed. Concentration distribution of electrogenerated etchant bromine as close as 8 micrometer to the surface of macrodisk is studied quantitatively.

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  • 收稿日期:  1996-01-09
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    沈阳化工大学材料科学与工程学院 沈阳 110142

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